X-ray silicon detectors for measuring hard x-ray radiation damage effects

Delia Wagner; Eugenia T. Halmagean; Dido Y. Loukas; K. Misiakos; Elisabeth Tsoi; A. Veron; M. Ohanisian

doi:10.1117/12.277698

7 July 1997 X-ray silicon detectors for measuring hard x-ray radiation damage effects

Delia Wagner, Eugenia T. Halmagean, Dido Y. Loukas, K. Misiakos, Elisabeth Tsoi, A. Veron, M. Ohanisian

Proceedings Volume 3115, Hard X-Ray and Gamma-Ray Detector Physics, Optics, and Applications; (1997) https://doi.org/10.1117/12.277698
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

For high sensitivity hard x-ray detector applications there is a solid-state alternative using high purity silicon as starting material. The paper presents some original results concerning a radiation hardened technology to be used for obtaining x-ray silicon detectors and the behavior of the special designed devices in a specific radiation environment. Original processing sequences were experimentally tested and results concerning the most performant technology suited for this specific application are presented. Specially designed gettering steps were applied by backside ion implantation and annealing for enhancing the minority carriers lifetime in the substrate material and for reducing leakage currents at orders less than 10 nA. After a complete presentation of the specific characteristics of the as obtained detectors, they were exposed and completely characterized in x-ray ambient up to dose levels of 10⁸ rad (E greater than 50 keV). Solutions for increasing the detector sensitivity and stability in radiation environments are proposed.

Citation Download Citation

Delia Wagner, Eugenia T. Halmagean, Dido Y. Loukas, K. Misiakos, Elisabeth Tsoi, A. Veron, and M. Ohanisian "X-ray silicon detectors for measuring hard x-ray radiation damage effects", Proc. SPIE 3115, Hard X-Ray and Gamma-Ray Detector Physics, Optics, and Applications, (7 July 1997); https://doi.org/10.1117/12.277698

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KEYWORDS

Sensors

Silicon

Radiation effects

X-ray detectors

X-rays

Capacitance

Hard x-rays

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