Testing printed circuit boards and MCMs with electron beams

Auguste B. El-Kareh

doi:10.1117/12.279394

25 September 1997 Testing printed circuit boards and MCMs with electron beams

Auguste B. El-Kareh

Proceedings Volume 3155, Charged Particle Optics III; (1997) https://doi.org/10.1117/12.279394
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

The testing of substrates for opens and shorts, whether multichip modules or printed circuit boards, is extremely important prior to their population with expensive active devices. As a result of the increase in the number and density of test points and the decrease of the pad sizes, conventional testing techniques are no longer possible. We describe an electron beam substrate tester which can address this problem. The method of testing with e-beams, the system itself and some of the associated technical problems which must be addressed are discussed in this article.

Citation Download Citation

Auguste B. El-Kareh "Testing printed circuit boards and MCMs with electron beams", Proc. SPIE 3155, Charged Particle Optics III, (25 September 1997); https://doi.org/10.1117/12.279394

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