X-ray micromachining of deep 3D terahertz waveguide components using a laser plasma source at 1-nm wavelength

I. C. Edmond Turcu; Chris M. Mann; Sung W. Moon; B. J. Maddison; Ric M. Allott; Nicola Lisi; Syed Ejazu Huq; Nam Seong Kim

doi:10.1117/12.284000

14 October 1997 X-ray micromachining of deep 3D terahertz waveguide components using a laser plasma source at 1-nm wavelength

I. C. Edmond Turcu, Chris M. Mann, Sung W. Moon, B. J. Maddison, Ric M. Allott, Nicola Lisi, Syed Ejazu Huq, Nam Seong Kim

Author Affiliations +

Proceedings Volume 3157, Applications of X Rays Generated from Lasers and Other Bright Sources; (1997) https://doi.org/10.1117/12.284000
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Fabrication of 3D terahertz waveguide components is demonstrated using a novel x-ray micromachining process with integral and embedded x-ray masks. 1 nm x-rays generated by a laser-plasma source are used to expose chemically amplified resist. A repeated exposure and development technique shortens the total x-ray exposure time to 10 min to obtain the required 48 micrometers high structures. A 2.5 THz waveguide cavity is fabricated in gold by electroplating the above resist microstructure.

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I. C. Edmond Turcu, Chris M. Mann, Sung W. Moon, B. J. Maddison, Ric M. Allott, Nicola Lisi, Syed Ejazu Huq, and Nam Seong Kim "X-ray micromachining of deep 3D terahertz waveguide components using a laser plasma source at 1-nm wavelength", Proc. SPIE 3157, Applications of X Rays Generated from Lasers and Other Bright Sources, (14 October 1997); https://doi.org/10.1117/12.284000

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