Short Wavelength Interferometric Testing Of X-Ray Optics

S. Mrowka; W. Harris; R. J. Speer

doi:10.1117/12.933120

24 March 1982 Short Wavelength Interferometric Testing Of X-Ray Optics

S. Mrowka, W. Harris, R. J. Speer

Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933120
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

Previous work has demonstrated the use of the LINNIK Point Diffraction Interferometer for the measurement of wavefront error in soft x-ray imaging systems. Operational wave-lengths from 632.8nm (He-Ne) down to 313.1nm (Hg) have been used. This paper describes our extension of the technique to 253.7nm together with a demonstration. of feasibility at 121.6 nm (Hydrogen. Lyman-α), we believe for the first time. Finally the possibility of working at soft X-Ray wavelengths is considered.

Citation Download Citation

S. Mrowka, W. Harris, and R. J. Speer "Short Wavelength Interferometric Testing Of X-Ray Optics", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); https://doi.org/10.1117/12.933120

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