CCD probe: application of linear array CCD in large-dimension measurement

Qun Hao; Mang Cao; Yang Zhao; Dacheng Li

doi:10.1117/12.279797

7 July 1997 CCD probe: application of linear array CCD in large-dimension measurement

Qun Hao, Mang Cao, Yang Zhao, Dacheng Li

Author Affiliations +

Proceedings Volume 3174, Videometrics V; (1997) https://doi.org/10.1117/12.279797
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

A research on using linear array CCD detecting technique in measuring form and position errors of large scale dimension is described in this paper. The basic idea of this kind of measurement is that using a stable aligned laser beam incident on a 1D asymmetrical phase plate to form a black line as the reference of the beam, form and position datum lines and planes can be established through a scanner. A linear array CCD is used to measure deviation between the datum and the quantity be measured directly and absolutely. In the paper, we also discuss the reading error of the CCD probe caused by various factors in detail and introduce the CCD probe and its signal processing circuit. Some of experiment results and its application are shown.

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Qun Hao, Mang Cao, Yang Zhao, and Dacheng Li "CCD probe: application of linear array CCD in large-dimension measurement", Proc. SPIE 3174, Videometrics V, (7 July 1997); https://doi.org/10.1117/12.279797

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