Preliminary results on x-ray lithography using a compact plasma focus

Sing Lee; X. Feng; Guan Zhang; Paul Choon Keat Lee; Mahe Liu; Adrian Serban; Stuart Victor Springham; Terence Kin Shun Wong; K. Wira; C. Selvam; A. Thang

doi:10.1117/12.280532

14 August 1997 Preliminary results on x-ray lithography using a compact plasma focus

Sing Lee, X. Feng, Guan Zhang, Paul Choon Keat Lee, Mahe Liu, Adrian Serban, Stuart Victor Springham, Terence Kin Shun Wong, K. Wira, C. Selvam, A. Thang

Author Affiliations +

Proceedings Volume 3183, Microlithographic Techniques in IC Fabrication; (1997) https://doi.org/10.1117/12.280532
Event: ISMA '97 International Symposium on Microelectronics and Assembly, 1997, Singapore, Singapore

Abstract

A 1.8kJ compact plasma focus source operated in neon is demonstrated as an x-ray source for microlithography in the wavelength range of 0.8-1.4 nm. Lithographs are obtained by exposing the resist to the x-ray point source with a mask in contact with the resist. The total energy emitted is measured using PIN diodes and photoconducting diamond detectors to be 15J per shot with a spectrum peaked at 1keV corresponding to the K shell lines from the neon working gas. The maximum repetition rate of 20 Hz allows lithographs to be obtained in less than 20 seconds when a reasonably sensitive resist is used.

Citation Download Citation

Sing Lee, X. Feng, Guan Zhang, Paul Choon Keat Lee, Mahe Liu, Adrian Serban, Stuart Victor Springham, Terence Kin Shun Wong, K. Wira, C. Selvam, and A. Thang "Preliminary results on x-ray lithography using a compact plasma focus", Proc. SPIE 3183, Microlithographic Techniques in IC Fabrication, (14 August 1997); https://doi.org/10.1117/12.280532

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available