Attenuated phase-shift masks reducing side-lobe effect in DRAM peripheral circuit region

Haruo Iwasaki; Keiichi Hoshi; Hiroyoshi Tanabe; Kunihiko Kasama

doi:10.1117/12.301229

12 February 1997 Attenuated phase-shift masks reducing side-lobe effect in DRAM peripheral circuit region

Haruo Iwasaki, Keiichi Hoshi, Hiroyoshi Tanabe, Kunihiko Kasama

Proceedings Volume 3236, 17th Annual BACUS Symposium on Photomask Technology and Management; (1997) https://doi.org/10.1117/12.301229
Event: 17th Annual BACUS Photomask Technology and Management, 1997, Redwood City, CA, United States

Abstract

We applied deep UV attenuated phase shift masks (PSMs) to the quarter micron level contact hole pattern layer of a DRAM. There were two different hole sizes: 0.26 micrometer hole in the memory cell region, and 0.35 micrometer in the peripheral circuit region. We examined two methods to reduce the side lobe effects in the peripheral circuit region. The first method was a chrome (Cr) shield method: the peripheral circuit region was covered by Cr. The second method was a mask bias method: large mask bias was added to contact hole patterns in memory cells. Both methods sufficiently reduced the side lobe effect in the peripheral circuit region.

Citation Download Citation

Haruo Iwasaki, Keiichi Hoshi, Hiroyoshi Tanabe, and Kunihiko Kasama "Attenuated phase-shift masks reducing side-lobe effect in DRAM peripheral circuit region", Proc. SPIE 3236, 17th Annual BACUS Symposium on Photomask Technology and Management, (12 February 1997); https://doi.org/10.1117/12.301229

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available