Spectrally Selective Properties Of Reactively Sputtered Ni-C And NiN[sub]x[/sub] Films

Marten Sikkens

doi:10.1117/12.933265

12 April 1982 Spectrally Selective Properties Of Reactively Sputtered Ni-C And NiN_x Films

Marten Sikkens

Proceedings Volume 0324, Optical Coatings for Energy Efficiency and Solar Applications; (1982) https://doi.org/10.1117/12.933265
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

Thin Ni-C and NiN_x films have been produced by reactive sputtering of Ni in an argon/ methane and an argon/nitrogen gas mixture, respectively. The properties of these films are discussed. Simple models are presented for the description of the optical properties. Both Ni-C and NiN_x films exhibit an excellent spectral selectivity.

Citation Download Citation

Marten Sikkens "Spectrally Selective Properties Of Reactively Sputtered Ni-C And NiN_x Films", Proc. SPIE 0324, Optical Coatings for Energy Efficiency and Solar Applications, (12 April 1982); https://doi.org/10.1117/12.933265

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