Fiber optic Fabry-Perot pressure sensor with the Si3N4/SiO2/Si3N4 diaphragm fabricated using micromachining technology

Myung Gyoo Kim; Jaehee Park; Shin-Won Kang; Byung-Ki Sohn

doi:10.1117/12.293555

14 November 1997 Fiber optic Fabry-Perot pressure sensor with the Si₃N₄/SiO₂/Si₃N₄ diaphragm fabricated using micromachining technology

Myung Gyoo Kim, Jaehee Park, Shin-Won Kang, Byung-Ki Sohn

Author Affiliations +

Proceedings Volume 3242, Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.293555
Event: Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS, 1997, Adelaide, Australia

Abstract

We have developed the high sensitivity fiber optic Fabry- Perot pressure sensor with a Si₃N₄/SiO₂/Si₃N₄(N/O/N) diaphragm fabricated using micromachining technology in the anisotropic etchant KOH solution. The configuration of this sensor was a 2 cm length fiber optic Fabry-Perot interferometer bonded to a 0.6 micrometers thick diaphragm. When the area of the N/O/N diaphragm used in the experiments was 2 X 2 mm², the pressure sensitivity was 0.11 radian/kPa, and when the area was 8 X 8 mm², the pressure sensitivity was increased to 1.57 radian/kPa. The phase change was dependent upon the applied pressure linearly.

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Myung Gyoo Kim, Jaehee Park, Shin-Won Kang, and Byung-Ki Sohn "Fiber optic Fabry-Perot pressure sensor with the Si₃N₄/SiO₂/Si₃N₄ diaphragm fabricated using micromachining technology", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293555

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