Transition from laboratory to manufacturing for a dry laser-assisted cleaning technology

Audrey C. Engelsberg

doi:10.1117/12.309499

3 June 1998 Transition from laboratory to manufacturing for a dry laser-assisted cleaning technology

Audrey C. Engelsberg

Proceedings Volume 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III; (1998) https://doi.org/10.1117/12.309499
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

A photon flux from a laser can provide an alternative method to clean and prepare industrial surfaces. The laser-based cleaning method presented in this paper uses only photons coupled with a laminar, flowing gas which is inert to the surface. This method can eliminate or reduce the water and chemical volumes used in industrial applications. In this paper, the development issues bringing a technology into the mainstream are discussed.

Citation Download Citation

Audrey C. Engelsberg "Transition from laboratory to manufacturing for a dry laser-assisted cleaning technology", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); https://doi.org/10.1117/12.309499

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