Paper
1 April 1998 X-ray scanner for the visualization of the spatial distribution of nanometer-scale roughness
Vladimir V. Protopopov, Kamil A. Valiev, Rafik M. Imamov
Author Affiliations +
Abstract
In the x-ray region, the reflection efficiency of a superpolished surface strongly depends on its roughness. This effect may be used to obtain a 2D map of the roughness spatial distribution for flat surfaces with a rms. roughness height of the order of one nanometer. The basic components of such a device are a precision mechanical 1D scanning stage and a temperature stabilized cooled x-ray linear detector array with quantum efficiency at CuK(alpha ) radiation.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir V. Protopopov, Kamil A. Valiev, and Rafik M. Imamov "X-ray scanner for the visualization of the spatial distribution of nanometer-scale roughness", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); https://doi.org/10.1117/12.304391
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
X-rays

Sensors

Spatial resolution

Reflection

Scanners

X-ray detectors

Signal detection

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