Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology

Kolin S. Brown; B. J. Taylor; Jeremy M. Dawson; Lawrence Anthony Hornak

doi:10.1117/12.302389

15 March 1998 Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology

Kolin S. Brown, B. J. Taylor, Jeremy M. Dawson, Lawrence Anthony Hornak

Author Affiliations +

Proceedings Volume 3276, Miniaturized Systems with Micro-Optics and Micromechanics III; (1998) https://doi.org/10.1117/12.302389
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

The merging of Microelectromechanical (MEM) devices and optics to create Microoptoelectromechanical (MOEM) systems provides opportunity to create new devices and to expand the functionality and applications of MEMS technology. Planar optical waveguide co-integration with surface micromachined (SMM) structures and inclusion of diffractive optical systems within 3D MEMS chip stack architectures have the potential to enable integrated optical test, metrology, and state feedback functions for complex MEM systems. This paper presents the results of research developing a fabrication process for co-integrating polymer optical waveguides with prefabricated MEMS devices. Multimode air superstrate rectangular optical waveguides have been fabricated using Ultradel optical polyimides over unreleased MEMS dice fabricated using the MultiUser MEMS Process Service (MUMPS) SMM process. These structures serve as the basic building block for exploration of guided wave integrated optical metrology functions for MEMS. Specially designed `split- comb' linear resonator devices enabling coupling of waveguide output to the resonator stage for position measurement are one class of a set of prototype MEMS function MUMPS testbeds under development for both guidance and evaluation of waveguide and free-space IOM efforts. Recently initiated work analytically and experimentally evaluating through-wafer free-space micro-optical systems for IOM will also be outlined.

Citation Download Citation

Kolin S. Brown, B. J. Taylor, Jeremy M. Dawson, and Lawrence Anthony Hornak "Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology", Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); https://doi.org/10.1117/12.302389

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