Excimer laser beam shaping and material processing using diffractive optics

Stewart W. Williams; Paul J. Marsden; Nick C. Roberts; Jagjit Sidhu; Mark A. Venables

doi:10.1117/12.321567

14 September 1998 Excimer laser beam shaping and material processing using diffractive optics

Stewart W. Williams, Paul J. Marsden, Nick C. Roberts, Jagjit Sidhu, Mark A. Venables

Proceedings Volume 3343, High-Power Laser Ablation; (1998) https://doi.org/10.1117/12.321567
Event: High-Power Laser Ablation, 1998, Santa Fe, NM, United States

Abstract

Diffractive optical systems have been developed to allow high efficiency material processing using excimer lasers. These systems allow beam homogenizing and shaping for surface treatments or parallel focusing for multiple hole drilling and production of microrelief. Beam utilization factors of 80% have been achieved.

Citation Download Citation

Stewart W. Williams, Paul J. Marsden, Nick C. Roberts, Jagjit Sidhu, and Mark A. Venables "Excimer laser beam shaping and material processing using diffractive optics", Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); https://doi.org/10.1117/12.321567

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