Random error behavior for rotating-analyzer ellipsometers

Eugene G. Bortchagovsky

doi:10.1117/12.306258

20 April 1998 Random error behavior for rotating-analyzer ellipsometers

Eugene G. Bortchagovsky

Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306258
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine

Abstract

The article gives a new approach for the consideration of the precision reachable by rotating-analyzer ellipsometers. Presented results approve all qualitative conclusions of the previous article on this topic, but the general equations and numerical results are different. Additionally this article treats the problem of optimizing the measurements of ellipsometric angles separately. It is shown, measured (Psi) and (Delta) are correlated for such type of ellipsometers. For most real in practice short-noise-limited case a good rule of thumb is proposed, which gives the compromise for suboptimize measurements as (rho) , so (Psi) and (Delta) at the same time. It is proved, as all sources of noise work simultaneously, as well as for null-ellipsometry it is impossible to make measurements at the Brewster angle with rotating-analyzer ellipsometers.

Citation Download Citation

Eugene G. Bortchagovsky "Random error behavior for rotating-analyzer ellipsometers", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306258

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