Interference devices for noncontact diagnostics of arbitrarily shaped rough surfaces

Peter P. Maksimyak

doi:10.1117/12.312707

2 July 1998 Interference devices for noncontact diagnostics of arbitrarily shaped rough surfaces

Peter P. Maksimyak

Proceedings Volume 3405, ROMOPTO '97: Fifth Conference on Optics; (1998) https://doi.org/10.1117/12.312707
Event: ROMOPTO '97: Fifth Conference on Optics, 1997, Bucharest, Romania

Abstract

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop a method for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion (sigma) ²_qq(0) < 1. The proposed diagnostic methods are applicable to surfaces with roughness period comparable to the radiation wavelength employed, low-reflectance and arbitrarily shaped surfaces, and surfaces of a thin plane-parallel plate. The sensitivity limit of the methods in measuring the standard deviation of surface profile from base line is about 0.003 mm.

Citation Download Citation

Peter P. Maksimyak "Interference devices for noncontact diagnostics of arbitrarily shaped rough surfaces", Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); https://doi.org/10.1117/12.312707

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