Surface micromachined devices for microwave and photonic applications

M. Frank Chang; Ming C. Wu; JeyHsin Yao; M. Edward Motamedi

doi:10.1117/12.311012

22 June 1998 Surface micromachined devices for microwave and photonic applications

M. Frank Chang, Ming C. Wu, JeyHsin Yao, M. Edward Motamedi

Author Affiliations +

Proceedings Volume 3419, Optoelectronic Materials and Devices; 34190S (1998) https://doi.org/10.1117/12.311012
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan

Abstract

As an enabling technology, Micro Electro Mechanical Systems (MEMS) have continuously provided new and improved design/implementation paradigms for a variety of scientific and engineering applications. In this paper, we review recent advances made in MEMS and its derivative MOEM devices for both microwave and photonic applications.

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M. Frank Chang, Ming C. Wu, JeyHsin Yao, and M. Edward Motamedi "Surface micromachined devices for microwave and photonic applications", Proc. SPIE 3419, Optoelectronic Materials and Devices, 34190S (22 June 1998); https://doi.org/10.1117/12.311012

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