Diagnostics of the laser deposition process by optical methods

Francesco Fuso

doi:10.1117/12.316603

14 July 1998 Diagnostics of the laser deposition process by optical methods

Francesco Fuso

Proceedings Volume 3423, Second GR-I International Conference on New Laser Technologies and Applications; (1998) https://doi.org/10.1117/12.316603
Event: Second GR-I International Conference on New Laser Technologies and Applications, 1997, Olympia, Greece

Abstract

We use optical methods for in-situ diagnostics in pulsed laser deposition of high temperature superconductive thin films. Our interest is focused on the composition modifications experienced by the plume of ablated material during its expansion from the target to the substrate in a molecular oxygen environment, which constitute a key point for the attainment of the correct film stoichiometry. Our diagnostics, based on absorption spectroscopy of atomic oxygen, provide a reliable tool for accurate analysis of the molecular oxygen dissociation involved in the reactive- collisional processes.

Citation Download Citation

Francesco Fuso "Diagnostics of the laser deposition process by optical methods", Proc. SPIE 3423, Second GR-I International Conference on New Laser Technologies and Applications, (14 July 1998); https://doi.org/10.1117/12.316603

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