Characterization of planarity of polymer thin films on rough surfaces

Wen-li Wu; William E. Wallace

doi:10.1117/12.328458

30 October 1998 Characterization of planarity of polymer thin films on rough surfaces

Wen-li Wu, William E. Wallace

Proceedings Volume 3426, Scattering and Surface Roughness II; (1998) https://doi.org/10.1117/12.328458
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

Angular dependent total reflection x-ray fluorescence (TRXF) is used to characterize the surface roughness or the extent of planarization of a thin polymer coating on a stainless steel surface with significant roughness. The objective of this work is to explore the use of TRXF as a non-contact and quantitative technique for characterizing surface roughness of thin film coatings. Once developed, this technique is expected to perform equally well on other surface coating materials other than polymers. Unlike optical methods, whether the thin films are transparent or not is not expected to affect the outcome of this measurement. TRXF data were collected with incident angle in the region around the polymer critical angle and were analyzed in conjunction with the results deduced from specular x-ray reflectivity (XR). Comparison between the TRXF results and those obtained from atomic force microscope (AFM) was also made in order to evaluate this TRXF method critically.

Citation Download Citation

Wen-li Wu and William E. Wallace "Characterization of planarity of polymer thin films on rough surfaces", Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); https://doi.org/10.1117/12.328458

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