Paper
30 October 1998 Light reflection from a porous surface where the size of the pore is near the wavelength
Vladimir Pshenitsin, Vadim Antonov, Alexei L. Diikov
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Abstract
The effipsometry parameters is calculated for the light reflection from porous surface with the pores which go vertically in the volume and have transverse size near the wavelength, the longitudinal size much more the wavelength and the size ofthe width ofthe partition much less the wavelength. The pore is considered as the waveguide and the porous surface is appcoximated by the periOdiCal system of the coupled vertical waveguides. The results of calculations show that the porous siructures with the pore size near the wavelength can redistrib.. ute mirror component ofreflected energy sufficiently increasing it in the nanow region ofangles of incidence. Keywords: reflection, scattering, porous surfaces, ellipsometry, rough surfaces
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir Pshenitsin, Vadim Antonov, and Alexei L. Diikov "Light reflection from a porous surface where the size of the pore is near the wavelength", Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); https://doi.org/10.1117/12.328455
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KEYWORDS
Reflection

Diffraction

Phase shifts

Ellipsometry

Waveguides

Polarization

Mirrors

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