Novel dc magnetron sputtering facility for space research and synchrotron radiation optics

Ahsen M. Hussain; Finn Erland Christensen; Giovanni Pareschi; Henning Friis Poulsen

doi:10.1117/12.331292

19 November 1998 Novel dc magnetron sputtering facility for space research and synchrotron radiation optics

Ahsen M. Hussain, Finn Erland Christensen, Giovanni Pareschi, Henning Friis Poulsen

Proceedings Volume 3444, X-Ray Optics, Instruments, and Missions; (1998) https://doi.org/10.1117/12.331292
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

A new DC magnetron sputtering facility has been build up at the Danish Space Research Institute, specially designed to enable uniform coatings of large area curved optics, such as Wolter-I mirror optics used in space telescopes and curved optics used in synchrotron radiation facilities. The paper is a brief description of this new facility and the future applications.

Citation Download Citation

Ahsen M. Hussain, Finn Erland Christensen, Giovanni Pareschi, and Henning Friis Poulsen "Novel dc magnetron sputtering facility for space research and synchrotron radiation optics", Proc. SPIE 3444, X-Ray Optics, Instruments, and Missions, (19 November 1998); https://doi.org/10.1117/12.331292

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