Determination of coherent strain field in periodic and self-assembled microstructures on crystal surfaces

Qun Shen; Stefan Kycia

doi:10.1117/12.332498

11 December 1998 Determination of coherent strain field in periodic and self-assembled microstructures on crystal surfaces

Qun Shen, Stefan Kycia

Author Affiliations +

Proceedings Volume 3448, Crystal and Multilayer Optics; (1998) https://doi.org/10.1117/12.332498
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

It is shown that high-resolution x-ray diffraction analyses on coherent thin-film microstructures on crystal surfaces can reveal a variety of information on interfacial strain fields. Diffraction features that can be observed include diffuse interference fringes, asymmetric grating diffraction patterns, and asymmetric crystal-truncation-rod profiles due to the strain-varying regions in a microstructure. From these diffraction features, both the longitudinal and the transverse strain gradients can be determined, in addition to the average elastic strain-tensor components.

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Qun Shen and Stefan Kycia "Determination of coherent strain field in periodic and self-assembled microstructures on crystal surfaces", Proc. SPIE 3448, Crystal and Multilayer Optics, (11 December 1998); https://doi.org/10.1117/12.332498

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