Optomechanical microprobe system for measuring very small parts on CMMs

Guijun Ji; Heinrich Iven Schwenke; Eugen Trapet

doi:10.1117/12.323273

2 October 1998 Optomechanical microprobe system for measuring very small parts on CMMs

Guijun Ji, Heinrich Iven Schwenke, Eugen Trapet

Proceedings Volume 3454, Vision Geometry VII; (1998) https://doi.org/10.1117/12.323273
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

An opto-mechanical microprobe system which combines the advantages of optical non-contact method and mechanical contact one is proposed for measuring very small parts on coordinate measuring machines. The principle is based on the evaluation of a central position of stylus ball by an optical system, the stylus ball is illuminated by a cold light source through an optical fiber. The most inventive advantage of the microprobe is that the deformation of its stylus does not influence the measuring results, so the stylus could be extremely thin. Until now an opto-mechanical microprobe with stylus ball of diameter of about 40 micrometers and stylus of diameter of about 20 micrometers is developed. Experiments show that the accuracy of the opto-mechanical microprobe is better than 1 micrometers and the measuring force is less than 10 (mu) N.

Citation Download Citation

Guijun Ji, Heinrich Iven Schwenke, and Eugen Trapet "Optomechanical microprobe system for measuring very small parts on CMMs", Proc. SPIE 3454, Vision Geometry VII, (2 October 1998); https://doi.org/10.1117/12.323273

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