Near-field planar apertured probe array for optical near-field memory

Motonobu Kourogi; Takashi Yatsui; Shigeru Ishimura; M. B. Lee; Nobufumi Atoda; Kazuo Tsutsui; Motoichi Ohtsu

doi:10.1117/12.326827

13 October 1998 Near-field planar apertured probe array for optical near-field memory

Motonobu Kourogi, Takashi Yatsui, Shigeru Ishimura, M. B. Lee, Nobufumi Atoda, Kazuo Tsutsui, Motoichi Ohtsu

Proceedings Volume 3467, Far- and Near-Field Optics: Physics and Information Processing; (1998) https://doi.org/10.1117/12.326827
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

We proposed and demonstrated a novel silicon planar apertured probe array as a near-field optical head for optical memory. In comparison with the conventional fiber probe, the apertured probe array has durability, higher read-out data transmission rate and it allows us to overcome difficulty of precise mechanical tracking of the single fiber probe because it can be used for reading data as a surface information. The probe array was fabricated by utilizing wet etching technique of a silicon wafer. Inverted pyramids were formed on the silicon plate, and apertures were fabricated at the tops of the inverted pyramids. An aperture with a size less than 100nm was realized. By scanning the probe array we obtained resolved images of the lines in corrugation which was made on a metal thin film. The observed line width was 250 nm. Furthermore, we put spherical lens inside the inverted pyramids to focus the propagating light at the apertures automatically. The near- field intensity at an aperture was 16 times larger than that without a spherical lens.

Citation Download Citation

Motonobu Kourogi, Takashi Yatsui, Shigeru Ishimura, M. B. Lee, Nobufumi Atoda, Kazuo Tsutsui, and Motoichi Ohtsu "Near-field planar apertured probe array for optical near-field memory", Proc. SPIE 3467, Far- and Near-Field Optics: Physics and Information Processing, (13 October 1998); https://doi.org/10.1117/12.326827

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