Interferometer for long gauge blocks up to 1000 mm and its measurement uncertainty

Tatsuya Narumi; Yoshio Saruki; Taizo Nakamura; Shunji Shutoh; Masaji Sawabe

doi:10.1117/12.323093

30 September 1998 Interferometer for long gauge blocks up to 1000 mm and its measurement uncertainty

Tatsuya Narumi, Yoshio Saruki, Taizo Nakamura, Shunji Shutoh, Masaji Sawabe

Proceedings Volume 3477, Recent Developments in Optical Gauge Block Metrology; (1998) https://doi.org/10.1117/12.323093
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

It is difficult to measure efficiently long gauge blocks by the interferometric method because long time is necessary for temperature run-in of long gauge blocks. The interferometer which can measure long gauge blocks up to 1000 mm has been developed by Mitutoyo Corporation. This interferometer is constructed with the optical system which can measure four gauge blocks one after another setting them once. The optical system of this interferometer can be easily adjusted and comparison measurements of gauge blocks by interferometry is also possible. As its light source, isotope lam p and laser are used. When the laser used, it is possible to measure directly 1000 mm. The uncertainty in measurement with this interferometer is evaluated as U equals 0.225 micrometers (k equals 2) for the case of 1000 mm long gauge block.

Citation Download Citation

Tatsuya Narumi, Yoshio Saruki, Taizo Nakamura, Shunji Shutoh, and Masaji Sawabe "Interferometer for long gauge blocks up to 1000 mm and its measurement uncertainty", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); https://doi.org/10.1117/12.323093

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available