Method of evaluating and tolerancing interferometer designs

Paul F. Michaloski; Andrew W. Kulawiec; Jon Fleig

doi:10.1117/12.322054

21 September 1998 Method of evaluating and tolerancing interferometer designs

Paul F. Michaloski, Andrew W. Kulawiec, Jon Fleig

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Proceedings Volume 3482, International Optical Design Conference 1998; (1998) https://doi.org/10.1117/12.322054
Event: International Optical Design Conference, 1998, Kona, HI, United States

Abstract

A ray tracing method of simulating interferometers from source to detector using standard optical design software is presented. The advantages, disadvantages and limitations of the method are discussed. The method is applied to the analysis of a phase measuring interferometer designed to test the form of cylindrical mechanical parts and the predicted performance is compared with experimental results.

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Paul F. Michaloski, Andrew W. Kulawiec, and Jon Fleig "Method of evaluating and tolerancing interferometer designs", Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); https://doi.org/10.1117/12.322054

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