Noncontact microtorque measurement for motors in MEMS

Yihui Wu; Hongguang Jia; Tongyu Wang; Li-Ding Wang

doi:10.1117/12.324057

1 September 1998 Noncontact microtorque measurement for motors in MEMS

Yihui Wu, Hongguang Jia, Tongyu Wang, Li-Ding Wang

Proceedings Volume 3512, Materials and Device Characterization in Micromachining; (1998) https://doi.org/10.1117/12.324057
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

An important performance criterion for practicable microactuators is the value of output torque. For the torque to be measured is very small, the influence of frictional force and other factors on testing are difficult avoided. So a new noncontact and direct experimental method was proposed, the basic theory and a simple and low-cost design of the measuring instrument is described in this paper. The testing range of shaft torque is from 10^-4Nm to 10^-7.

Citation Download Citation

Yihui Wu, Hongguang Jia, Tongyu Wang, and Li-Ding Wang "Noncontact microtorque measurement for motors in MEMS", Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); https://doi.org/10.1117/12.324057

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