Deep finlike AlGaAs nanostructure fabricated by CAIBE

Sheng Li Wu; Lijun Wang; Richard C. Tiberio; Seng Tiong Ho

doi:10.1117/12.318000

12 August 1998 Deep finlike AlGaAs nanostructure fabricated by CAIBE

Sheng Li Wu, Lijun Wang, Richard C. Tiberio, Seng Tiong Ho

Proceedings Volume 3551, Integrated Optoelectronics II; (1998) https://doi.org/10.1117/12.318000
Event: Photonics China '98, 1998, Beijing, China

Abstract

We show that very narrow fin-like periodic nanostructure with 0.1 micrometer width, 1 micrometer depth, and a few microns length can be fabricated on AlGaAs using Chemically-Assisted- Ion-Beam-Etching with oxidized AlGaAs as negative mask. This technique may have applications to nanoscale devices fabrication.

Citation Download Citation

Sheng Li Wu, Lijun Wang, Richard C. Tiberio, and Seng Tiong Ho "Deep finlike AlGaAs nanostructure fabricated by CAIBE", Proc. SPIE 3551, Integrated Optoelectronics II, (12 August 1998); https://doi.org/10.1117/12.318000

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