Laser-assisted chemical vapor deposition of diamond microstructures

Zsolt Toth; Adam Mechler; Peter Heszler

doi:10.1117/12.320995

19 August 1998 Laser-assisted chemical vapor deposition of diamond microstructures

Zsolt Toth, Adam Mechler, Peter Heszler

Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.320995
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary

Abstract

High quality diamond has been deposited area selectivity onto thin tungsten films layered onto fused silica substrates in a hot filament CVD reactor. The deposition method uses a hot filament process which is combined with localized heating by a focused Nd-YAG laser beam.

Citation Download Citation

Zsolt Toth, Adam Mechler, and Peter Heszler "Laser-assisted chemical vapor deposition of diamond microstructures", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.320995

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