Paper
14 April 1999 Engineering high-quality InxGa1-xP graded composition buffers on GaP for transparent substrate light-emitting diodes
Andrew Y. Kim, Eugene A. Fitzgerald
Author Affiliations +
Abstract
We present the development of high-quality InxGa1-xP graded buffers on GaP substrates (InxGa1-xP/GaP) for use in epitaxial transparent-substrate light-emitting diodes. The evolution of microstructure and dislocation dynamics of these materials has been explored as a function of growth conditions. The primarily limiting factor in obtaining high-quality InxGa1-xP/GaP is a new defect microstructure that we call branch defects. Branch defects pin dislocations and result in dislocation pileups that cause an escalation in threading dislocation density with continued grading.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew Y. Kim and Eugene A. Fitzgerald "Engineering high-quality InxGa1-xP graded composition buffers on GaP for transparent substrate light-emitting diodes", Proc. SPIE 3621, Light-Emitting Diodes: Research, Manufacturing, and Applications III, (14 April 1999); https://doi.org/10.1117/12.344465
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Cited by 3 scholarly publications.
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KEYWORDS
Light emitting diodes

Semiconducting wafers

Gallium arsenide

Aluminum

Indium

Temperature metrology

Epitaxy

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