Development of a technique for rapid at-wavelength inspection of EUV mask blanks

Steven J. Spector; Ping Luo; Anthony E. Novembre; Leonidas E. Ocola; Donald L. White; Donald M. Tennant; Obert R. Wood II

doi:10.1117/12.351134

25 June 1999 Development of a technique for rapid at-wavelength inspection of EUV mask blanks

Steven J. Spector, Ping Luo, Anthony E. Novembre, Leonidas E. Ocola, Donald L. White, Donald M. Tennant, Obert R. Wood II

Author Affiliations +

Proceedings Volume 3676, Emerging Lithographic Technologies III; (1999) https://doi.org/10.1117/12.351134
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

We have dramatically increased the sensitivity of a technique for the rapid inspection of EUV multilayer-coated mask blanks. In this technique an EUV sensitive resist is applied directly to a mask blank which is then flood exposed with EUV light and partially developed. Reflectivity defects in the mask blank results in mounds in a partially developed positive resists that appear as high contrast objects in a standard Nomarski microscope. The use of a higher contrast resist is shown experimentally to result in the creation of dramatically taller mounds. A simple model for the exposure and development of the resists has been developed and the predictions of the model compare well with the experimental results.

Citation Download Citation

Steven J. Spector, Ping Luo, Anthony E. Novembre, Leonidas E. Ocola, Donald L. White, Donald M. Tennant, and Obert R. Wood II "Development of a technique for rapid at-wavelength inspection of EUV mask blanks", Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); https://doi.org/10.1117/12.351134

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available