Understanding systematic and random CD variations using predictive modeling techniques

Donis G. Flagello; Hans van der Laan; Jan B.P. van Schoot; Igor Bouchoms; Bernd Geh

doi:10.1117/12.354328

26 July 1999 Understanding systematic and random CD variations using predictive modeling techniques

Donis G. Flagello, Hans van der Laan, Jan B.P. van Schoot, Igor Bouchoms, Bernd Geh

Author Affiliations +

Proceedings Volume 3679, Optical Microlithography XII; (1999) https://doi.org/10.1117/12.354328
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

This work analyzes the contributions to CD variation by building 3 predictive models that describe linewidth variation. The first model uses an exposure and focus budget analysis to create distributions that are used as input into a Monte Carlo analysis, where the output is a distribution of linewidth. The second model explores the effects of systematic intra-field effects by assuming that lens properties such as aberration will only cause global changes to the CD function, i.e. the function only shifts in focus and exposure. In combination with measurements such as focal pane, illumination uniformity and flare, a description of AFLV is constructed that reveals CD maps of the image field as a function of system focus and exposure. The third model combines the previous two techniques by incorporating random and systematic errors to create an across-wafer linewidth variation simulation. An example is shown using a scanner system and 0.18 micrometers structures. Systematic contributors to AFLV such as aberrations and reticle errors are included, as well as addition of random distributions of tilt eros and full wafer processing errors.

Citation Download Citation

Donis G. Flagello, Hans van der Laan, Jan B.P. van Schoot, Igor Bouchoms, and Bernd Geh "Understanding systematic and random CD variations using predictive modeling techniques", Proc. SPIE 3679, Optical Microlithography XII, (26 July 1999); https://doi.org/10.1117/12.354328

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE