Computer-aided design tools for economical MEMS fabrication processes

Christian Schneider; Andreas Priebe; Rainer Brueck; Kai Hahn

doi:10.1117/12.341212

10 March 1999 Computer-aided design tools for economical MEMS fabrication processes

Christian Schneider, Andreas Priebe, Rainer Brueck, Kai Hahn

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341212
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Since the early 70s when microsystem technology was first introduce an enormous market for MST-products has been developed. Airbag sensors, micro pumps, ink jet nozzles etc. and the market is just about to start up. Establishing these products for a reasonable price requires mass production. Meanwhile, also computer-based design-tools have been developed in order to reduce the expenses for MST-design. In contrast to other physical design processes like e.g. in micro electronics, MEMS physical design is characterized by the fact that each product requires a tailored sequence of fabrication steps, usually selected from a variety of processing alternatives. The selection from these alternatives is based on economical constraints. Therefore, the design has a strong influence on the money and time spent to take an MST-product to market.

Citation Download Citation

Christian Schneider, Andreas Priebe, Rainer Brueck, and Kai Hahn "Computer-aided design tools for economical MEMS fabrication processes", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341212

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