Examples of MEMS technologies resulting in industrial transfers

Jean-Sebastian Danel; Michel Borel; Marie-Therese Delaye; Bernard Diem; Hubert Grange; France Michel; Patrice Rey; Sylvie Viollet-Bosson

doi:10.1117/12.341238

10 March 1999 Examples of MEMS technologies resulting in industrial transfers

Jean-Sebastian Danel, Michel Borel, Marie-Therese Delaye, Bernard Diem, Hubert Grange, France Michel, Patrice Rey, Sylvie Viollet-Bosson

Author Affiliations +

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341238
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

We present here three technological processes developed by LETI which have resulted in successful industrial transfers for MEMS.

Citation Download Citation

Jean-Sebastian Danel, Michel Borel, Marie-Therese Delaye, Bernard Diem, Hubert Grange, France Michel, Patrice Rey, and Sylvie Viollet-Bosson "Examples of MEMS technologies resulting in industrial transfers", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341238

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