True temperature measurements on microscopic semiconductor targets

Grant C. Albright; James A. Stump; John D. McDonald; Herbert Kaplan

doi:10.1117/12.342291

19 March 1999 True temperature measurements on microscopic semiconductor targets

Grant C. Albright, James A. Stump, John D. McDonald, Herbert Kaplan

Proceedings Volume 3700, Thermosense XXI; (1999) https://doi.org/10.1117/12.342291
Event: AeroSense '99, 1999, Orlando, FL, United States

Abstract

Thermal imaging of microscopic targets has become a critical need in the manufacturing of semiconductors and other electronic devices as thermal budgets become ever more demanding and devices become more compact and powerful. This paper describes the third generation of thermal microimagers, representing the newest advances in a twenty-year evolution of instruments having the unique capability of spatial emissivity correction for 'true' surface temperature measurement. The detection and identification of design and process defects and the management of device thermal budgets are described. The achievement of a measurement spatial resolution of better than 3 micrometers, previously unattainable, is also described.

Citation Download Citation

Grant C. Albright, James A. Stump, John D. McDonald, and Herbert Kaplan "True temperature measurements on microscopic semiconductor targets", Proc. SPIE 3700, Thermosense XXI, (19 March 1999); https://doi.org/10.1117/12.342291

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available