Mechanical properties of fullerite and diamondlike carbon films using surface acoustic waves and nanoindentation

Asta Richter; Ronald Ries

doi:10.1117/12.344714

8 April 1999 Mechanical properties of fullerite and diamondlike carbon films using surface acoustic waves and nanoindentation

Asta Richter, Ronald Ries

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Proceedings Volume 3725, International Conference on Solid State Crystals '98: Epilayers and Heterostructures in Optoelectronics and Semiconductor Technology; (1999) https://doi.org/10.1117/12.344714
Event: International Conference on Solid State Crystals '98, 1998, Zakopane, Poland

Abstract

C₆₀ and amorphous diamond-like carbon (DLC) films have been grown by thermal evaporation and laser ablation techniques at different substrate temperatures and on various substrates. The elastic modulus and the hardness of the films have been investigated by surface acoustic waves and nanoindentation. Both methods are completely new and designed for investigations of very thin films. For homogeneous C₆₀ films the Young's modulus was found to be 14 GPa and the Poisson's ratio of 0.2. The measured nanohardness of 167 MPa corresponds with the microhardness value of 130 MPa. There is a correlation between deposition techniques and hardness as well as Young's modulus for DLC films.

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Asta Richter and Ronald Ries "Mechanical properties of fullerite and diamondlike carbon films using surface acoustic waves and nanoindentation", Proc. SPIE 3725, International Conference on Solid State Crystals '98: Epilayers and Heterostructures in Optoelectronics and Semiconductor Technology, (8 April 1999); https://doi.org/10.1117/12.344714

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