Generation of contrast-enhanced speckle field and its application to surface roughness measurement

Hirofumi Kadono; Shinji Hoshino; Satoru Toyooka

doi:10.1117/12.346809

29 April 1999 Generation of contrast-enhanced speckle field and its application to surface roughness measurement

Hirofumi Kadono, Shinji Hoshino, Satoru Toyooka

Proceedings Volume 3729, Selected Papers from International Conference on Optics and Optoelectronics '98; (1999) https://doi.org/10.1117/12.346809
Event: Selected Papers from the International Conference on Optics and Optoelectronics, 1998, Dehradun, India

Abstract

In this study, an optical system to generate contrast- enhanced speckles from ordinary rough surface object is proposed. Its statistical properties are studied as a function of the surface roughness and the defocusing distance in detail with special attention to its application to the determination of the roughness. It is revealed that the contrast of contrast-enhanced speckles depends only on the rms roughness of the rough surface object. Usefulness of the contrast-enhanced speckles on the measurement of surface roughness of the object is experimentally confirmed.

Citation Download Citation

Hirofumi Kadono, Shinji Hoshino, and Satoru Toyooka "Generation of contrast-enhanced speckle field and its application to surface roughness measurement", Proc. SPIE 3729, Selected Papers from International Conference on Optics and Optoelectronics '98, (29 April 1999); https://doi.org/10.1117/12.346809

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