Misalignment modes in high-performance optical systems

Michael R. Descour; Mark R. Willer; Curtis Earl Volin

doi:10.1117/12.360062

27 August 1999 Misalignment modes in high-performance optical systems

Michael R. Descour, Mark R. Willer, Curtis Earl Volin

Proceedings Volume 3737, Design and Engineering of Optical Systems II; (1999) https://doi.org/10.1117/12.360062
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

Misalignment modes are combinations of rigid-body perturbations to the optical elements that comprise an optical system. Comparison of misalignment modes associated with metrology data and projection-camera performance can be used to increase the sensitivity of metrology measurements to specific camera-performance specification such as chief- ray distortion. Selection of measurable misalignment modes in the case of metrology and interesting misalignment modes in the case of camera performance is based on a determination of whether a mode can 'fit' into a projection camera given actuator-stroke and mirror tilt bounds. Measurement and interest subspaces are next compared using distance between subspaces. As an example of this type of analysis, we find that exit-pupil wavefront measurements can be made more sensitive to chief-ray distortion if these measurements are collected at field positions outside the ring field of view of an extreme ultraviolet lithography projection camera.

Citation Download Citation

Michael R. Descour, Mark R. Willer, and Curtis Earl Volin "Misalignment modes in high-performance optical systems", Proc. SPIE 3737, Design and Engineering of Optical Systems II, (27 August 1999); https://doi.org/10.1117/12.360062

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