Interferometry method for measuring head-disk spacing down to contact

Xinqun Liu; Warwick W. Clegg; Bo Liu

doi:10.1117/12.347754

7 May 1999 Interferometry method for measuring head-disk spacing down to contact

Xinqun Liu, Warwick W. Clegg, Bo Liu

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347754
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

In this paper, we give a detailed analysis of the working principle, application limits, and potential problems of the intensity interferometry flying height testing, one of the most popularly used flying height testing techniques. Then, a phase-shift method is proposed to improve the sensitivity of this technique when the head-disk spacing is below 10 nm or near contact, based on manufacturing the glass testing disk to have a thickness within specified tolerances. Theoretical analysis and numerical evaluation are presented.

Citation Download Citation

Xinqun Liu, Warwick W. Clegg, and Bo Liu "Interferometry method for measuring head-disk spacing down to contact", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347754

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