Ultraprecision machining of ceramics for optical components

Hiroshi Eda; Jun Shimizu; Libo Zhou

doi:10.1117/12.347707

7 May 1999 Ultraprecision machining of ceramics for optical components

Hiroshi Eda, Jun Shimizu, Libo Zhou

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347707
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

A machining system was developed, to achieve ductile-regime machining of ceramics and glasses for optical components. The machine tool is capable of cutting, grinding, lapping or polishing hard and brittle materials in ductile-regime. As a key component in building the system, giant magnetostrictive alloys with large output power and outstanding elongation are employed to comprise an ultra-precision actuator. The actuator can be used as a high frequency vibration actuator as well as a fine positioning device. The actuator was made of newly developed composition material. In this paper, the results of the actuator used as a high-accuracy positioning device in grinding processes are presented. Various kinds of ceramic materials for optical components were subjected to experiments. The results indicate that the newly developed machine tool is capable of realizing ductile-regime process.

Citation Download Citation

Hiroshi Eda, Jun Shimizu, and Libo Zhou "Ultraprecision machining of ceramics for optical components", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347707

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