Best focus shift issues from focusing system of ASML PAS-5000/50 steppers

Ming-Huei Tseng; Feng-Liang Lai; Li-Kong Turn

doi:10.1117/12.346893

28 April 1999 Best focus shift issues from focusing system of ASML PAS-5000/50 steppers

Ming-Huei Tseng, Feng-Liang Lai, Li-Kong Turn

Proceedings Volume 3741, Lithography for Semiconductor Manufacturing; (1999) https://doi.org/10.1117/12.346893
Event: Microelectronic Manufacturing Technologies, 1999, Edinburgh, United Kingdom

Abstract

The best focus shift problem was observed on PAS-5000/50 I- line system. The best focus shift could induce poor resist profile in back-end lithography exposure processes, and caused blind via-holes or damage on conductor lines after plasma etch. The effects of topography change, pattern layout and focus laser spot position on the best focus determination were proved related to the focusing system design, single point focus detection with small size probe beam. of PAS-5000/50 steppers. In the main paper, the weak points of the design are pointed out, i.e. the unwanted information due to its dependence on step topography and layout may be collected and cause defocused resist profile during focusing. Though the application of dark-tone digitized scribe line design on dielectric layers reduces step topography discrepancy between main cell and scribe line and partially solves the problems; however, the complete solutions rely on the fundamental improvements on the stepper focusing algorithm.

Citation Download Citation

Ming-Huei Tseng, Feng-Liang Lai, and Li-Kong Turn "Best focus shift issues from focusing system of ASML PAS-5000/50 steppers", Proc. SPIE 3741, Lithography for Semiconductor Manufacturing, (28 April 1999); https://doi.org/10.1117/12.346893

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available