Static and dynamic characterization of polysilicon surface-micromachined actuators

Volker Laible; Paul M. Hagelin; Olav Solgaard; Ernst Obermeier

doi:10.1117/12.360491

31 August 1999 Static and dynamic characterization of polysilicon surface-micromachined actuators

Volker Laible, Paul M. Hagelin, Olav Solgaard, Ernst Obermeier

Proceedings Volume 3876, Micromachined Devices and Components V; (1999) https://doi.org/10.1117/12.360491
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

A measurement system for static and dynamic characterization of silicon micromachines was developed. The computer- controlled system, using a HeNe-laser at 633 nm and a two- dimensional position sensor, allows simultaneous measurements of optical beam motion on two axes. To demonstrate the flexibility and functionality of the setup, measurements on various polysilicon surface-micromachined mirrors were performed. These measurements included tilt-angle versus driving-voltage curves, frequency responses, and motion perpendicular to the primary scan axis.

Citation Download Citation

Volker Laible, Paul M. Hagelin, Olav Solgaard, and Ernst Obermeier "Static and dynamic characterization of polysilicon surface-micromachined actuators", Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); https://doi.org/10.1117/12.360491

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