Coated optics for DUV excimer laser application

Jens Ullmann; Michael Mertin; Hans Lauth; Helmut Bernitzki; Klaus R. Mann; Detlev Ristau; Winfried Arens; Roland Thielsch; Norbert Kaiser

doi:10.1117/12.379348

3 March 2000 Coated optics for DUV excimer laser application

Jens Ullmann, Michael Mertin, Hans Lauth, Helmut Bernitzki, Klaus R. Mann, Detlev Ristau, Winfried Arens, Roland Thielsch, Norbert Kaiser

Author Affiliations +

Proceedings Volume 3902, Laser-Induced Damage in Optical Materials: 1999; (2000) https://doi.org/10.1117/12.379348
Event: Laser-Induced Damage in Optical Materials: 1999, 1999, Boulder, CO, United States

Abstract

Recent developments of DUV-excimer laser applications have gained in demands for radiation resistant coated components at interesting wavelengths. To meet the requirements of long term reliability and high pulse number throughput superior performance of the optical components with lowest absorption and scattering losses are necessary. In the framework of the German Joint Research Project OPUS II efforts are made to investigate the optical properties, the radiation resistance and long term stability of single layers and layer system of interest in the DUV. The evaluation of optical coatings and coating system on different substrate materials was carried out by scattering experiments, atomic force microscopy, IR spectroscopy, calorimetric absorption measurements, and determination of laser induced damage threshold. Additionally, from the spectralphotometric measurements the optical behavior of the films was examined.

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Jens Ullmann, Michael Mertin, Hans Lauth, Helmut Bernitzki, Klaus R. Mann, Detlev Ristau, Winfried Arens, Roland Thielsch, and Norbert Kaiser "Coated optics for DUV excimer laser application", Proc. SPIE 3902, Laser-Induced Damage in Optical Materials: 1999, (3 March 2000); https://doi.org/10.1117/12.379348

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