MEMS (micro-electro-mechanical Systems) technology: an overview and SCL's role

Ashwani Tuknayat; H. S. Jatana; Dina Nath Singh

doi:10.1117/12.369468

9 November 1999 MEMS (micro-electro-mechanical systems) technology: an overview and SCL's role

Ashwani Tuknayat, H. S. Jatana, Dina Nath Singh

Author Affiliations +

Proceedings Volume 3903, Indo-Russian Workshop on Micromechanical Systems; (1999) https://doi.org/10.1117/12.369468
Event: Indo-Russian Workshop on Micromechanical Systems, 1999, New Delhi, India

Abstract

Today's advanced IC fabrication techniques have let silicon micromachined into the tiniest electromechanical systems ever built. In just ten years, MEMS has blossomed into a vital industry with numerous practical applications. Semiconductor Complex Ltd., the nation's leading VLSI company has developed CMOS technologies which are in tune with the MEMS fabrication process.

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Ashwani Tuknayat, H. S. Jatana, and Dina Nath Singh "MEMS (micro-electro-mechanical systems) technology: an overview and SCL's role", Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); https://doi.org/10.1117/12.369468

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