Novel thin-film deposition method and system with IR-FEL

Masato Yasumoto; Norimasa Umesaki; Takio Tomimasu; Akira Ishizu; Kunio Awazu

doi:10.1117/12.387589

7 June 2000 Novel thin-film deposition method and system with IR-FEL

Masato Yasumoto, Norimasa Umesaki, Takio Tomimasu, Akira Ishizu, Kunio Awazu

Proceedings Volume 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V; (2000) https://doi.org/10.1117/12.387589
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States

Abstract

We propose a novel method for thin film deposition with an IR-FEL using the IR-FEL wavelength tunability in infrared region. This is an unique method in which only the vapor deposition molecule is activated by applying laser of vibrational excitation wavelength of the vapor deposition molecule on the substrate surface, when the thin film intends to deposit on the substrate. We developed two equipments in order to realize and evaluate the new method. One is IR-FEL assisted RF sputter deposition chamber system, the other is IR-FEL assisted laser ablation chamber system. Moreover using the former equipment, we carry out the preliminary experiment on the preparation of ITO (In-Sn-O) thin film.

Citation Download Citation

Masato Yasumoto, Norimasa Umesaki, Takio Tomimasu, Akira Ishizu, and Kunio Awazu "Novel thin-film deposition method and system with IR-FEL", Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); https://doi.org/10.1117/12.387589

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available