6k-pixel 160-MHz CCD linescan sensor

Nixon O; Colin J. Flood

doi:10.1117/12.385473

15 May 2000 6k-pixel 160-MHz CCD linescan sensor

Nixon O, Colin J. Flood

Proceedings Volume 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications; (2000) https://doi.org/10.1117/12.385473
Event: Electronic Imaging, 2000, San Jose, CA, United States

Abstract

We have developed a linescan sensor suited for high image quality, high-resolution, high-speed imaging. The 6k-pixel sensor has: four corner outputs each operating at 40 MHz for high scanning speed; 7 micrometers pixels for shorter sensor length and simpler optical design; an exposure control and antiblooming structure that does not produce imaging artifacts; 9.5 (mu) V/e charge conversion efficiency at the output for enhanced sensitivity and dynamic range under light-starved conditions; optimized pinned photodiodes for low image lag (< 350 electrons) and enhanced UV response (> 40% QE at 250 nm); 100% fill factor down to the deep UV; a pixel storage structure that suppresses photosite-to- shift-register optical crosstalk; highly linear output structures and amplifiers (< 1% non-linearity); matched 5- V 2-phase clocks that can be driven with off-the-shelf CMOS drivers; output waveform shape that allows 40-MHz CDS; and photoresponse non-uniformity that is < +/- 2% of the signal.

Citation Download Citation

Nixon O and Colin J. Flood "6k-pixel 160-MHz CCD linescan sensor", Proc. SPIE 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications, (15 May 2000); https://doi.org/10.1117/12.385473

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