Paper
21 March 2000 Design of an interferometer for the measurement of long radius optics
Author Affiliations +
Abstract
Veeco Metrology has designed, built and installed at the California Institute of Technology an interferometer for testing long radius optics for LIGO (Laser Interferometer Gravitational-Wave Observatory). Its accuracy is better than (lambda) /100 P-V for focus and astigmatism coefficients and (lambda) /1000 RMS for the residual surface. Its repeatability is better than (lambda) /4000 RMS with retrace error below 6 nm P-V with 4 fringes of tilt. ROC (radius of curvature) measurement error is less than 3%. In this paper we outline the requirements for the interferometer and discuss more challenging aspects of both the optical design and the alignment. Some measurement results are also presented.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sen Han, Joseph A. Lamb, Artur G. Olszak, and Erik Novak "Design of an interferometer for the measurement of long radius optics", Proc. SPIE 3966, Machine Vision Applications in Industrial Inspection VIII, (21 March 2000); https://doi.org/10.1117/12.380092
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Cited by 4 scholarly publications.
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KEYWORDS
Interferometers

Monochromatic aberrations

LIGO

Distortion

Collimators

Metrology

Mirrors

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