One Dimensional Linear Refractive Index Profiles From Angular Reflectivity Measurements At One Wavelength

M. N. Grimbergen; R. B. Goldner

doi:10.1117/12.935519

28 November 1983 One Dimensional Linear Refractive Index Profiles From Angular Reflectivity Measurements At One Wavelength

M. N. Grimbergen, R. B. Goldner

Author Affiliations +

Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935519
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

A technique has been developed to determine one-dimensional linear refractive index profiles for planar thin films from angular reflectivity measurements at one wavelength. The technique uses a nonlinear least-squares fitting algorithm, together with a multilayer characteristic matrix model. The fitting error is examined as a function of adjustable parameters using a three-dimensional graphing routine. From synthetic data it is demonstrated that, within the domain of chosen adjustable parameters and realistic experimental uncertainties, a best linear profile fit can be obtained. The technique is demonstrated using reflectance data on laboratory samples of In₂0₃:Sn.

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M. N. Grimbergen and R. B. Goldner "One Dimensional Linear Refractive Index Profiles From Angular Reflectivity Measurements At One Wavelength", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935519

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