18- to 20-nm broadband multilayer at normal incidence

Changjun Ke; Zhansan Wang; Y. Z. Ma; Jianlin Cao; Xingdan Chen

doi:10.1117/12.391570

18 July 2000 18- to 20-nm broadband multilayer at normal incidence

Changjun Ke, Zhansan Wang, Y. Z. Ma, Jianlin Cao, Xingdan Chen

Proceedings Volume 4012, X-Ray Optics, Instruments, and Missions III; (2000) https://doi.org/10.1117/12.391570
Event: Astronomical Telescopes and Instrumentation, 2000, Munich, Germany

Abstract

A better random method used for improving light throughput of a soft X-ray multilayer has been developed in the 18 - 20 nm spectral region, it bases on the traditional theory of periodic multilayer, a 8% gain in integrated reflectance is obtained. We present ensemble calculation at the same time, and the multilayer is fabricated by magnetron sputtering. Finally low-angle X-ray diffraction and reflectance comparative measurement are used for testing the multilayer. The results demonstrate that layer thickness disorder yields band broadening (for both wavelength and angle) and increased integrated reflectance in the spectral range with respect to periodic multilayer, but accompanied with a reduction in reflectance peak. Layer thickness disorder makes it more difficult to fabricate broadband multilayer, raising the techniques of control layer thickness is the keystone of experiments.

Citation Download Citation

Changjun Ke, Zhansan Wang, Y. Z. Ma, Jianlin Cao, and Xingdan Chen "18- to 20-nm broadband multilayer at normal incidence", Proc. SPIE 4012, X-Ray Optics, Instruments, and Missions III, (18 July 2000); https://doi.org/10.1117/12.391570

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available