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The possibility of creation of capacitive discharge excilamps with short pulse duration was studied. There were three types of pulsed excilamps in experiments: cylindrical glow discharge lamp, capacitive discharge lamp, high pressure volume discharge planar lamp with UV-preionization of discharge gap. In capacitive discharge cylindrical KrCl-excilamp, at (lambda) approximately 222 nm the radiation pulse power through the end face of a lamp up to 2.5 kW has been obtained. Powerful radiation pulses of 50 ns in duration were obtained at pulse repetition rate of 1 kHz. In case of high pressure volume discharge at operating pressure of several atmospheres the radiation peak power density values were as much as 5 kW/cm2 at (lambda) approximately 250 nm, and 3.5 kW/cm2 at (lambda) approximately 222 nm and at (lambda) approximately 308 nm. In cylindrical longitudinal excilamp with inner electrodes with Xe- I2 mixture the total pulse power of 75 kW has been obtained. The first experiments with harnessing of inductive energy stores for excilamp excitation have been carried out.
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Victor F. Tarasenko, Anatolii V. Krivonosenko, Mikhail I. Lomaev, Victor S. Skakun, Edward A. Sosnin, Dmitrii V. Shitz, "High-power excilamps with short-pulse duration," Proc. SPIE 4065, High-Power Laser Ablation III, (16 August 2000); https://doi.org/10.1117/12.407308