Carbon nitride coherently grown on Si (111) substrates by pulsed laser irradiation

G. Barucca; Guiseppe Majni; Paolo Mengucci; Gilberto Leggieri; Armando Luches; Maurizio Martino; Alessio Perrone

doi:10.1117/12.378165

25 February 2000 Carbon nitride coherently grown on Si (111) substrates by pulsed laser irradiation

G. Barucca, Guiseppe Majni, Paolo Mengucci, Gilberto Leggieri, Armando Luches, Maurizio Martino, Alessio Perrone

Proceedings Volume 4070, ALT '99 International Conference on Advanced Laser Technologies; (2000) https://doi.org/10.1117/12.378165
Event: ALT'99 International Conference: Advanced Laser Technologies, 1999, Potenza-Lecce, Italy

Abstract

Carbon nitride films were deposited on Si substrates at room temperature by XeCl laser ablation of graphite targets in low pressure N₂ atmosphere at the fluence of 12 J/cm². The films have been submitted to x-ray diffraction and transmission electron microscopy investigations in order to study the structure of the films. Results showed that the samples are constituted of a continuous amorphous film inside which microcrystals are dispersed. A new CN_x phase has been identified. This new phase has a triclinic crystallographic cell with lattice parameters a equals b equals 0.384 nm, c equals 0.438 +/- 0.007 nm, (alpha) equals 110 +/- 1 degrees, (beta) equals 105 +/- 1 degrees, and (gamma) equals 120 degrees. It coherently grows on the Si plane with the following orientation relationships: (001)_CNx (parallel) (111)_Si; (100)_CNx (parallel) (1-10)_Si and (010)_CNx (parallel) (01-1)_Si.

Citation Download Citation

G. Barucca, Guiseppe Majni, Paolo Mengucci, Gilberto Leggieri, Armando Luches, Maurizio Martino, and Alessio Perrone "Carbon nitride coherently grown on Si (111) substrates by pulsed laser irradiation", Proc. SPIE 4070, ALT '99 International Conference on Advanced Laser Technologies, (25 February 2000); https://doi.org/10.1117/12.378165

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available